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KMID : 0381919970270040483
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Korean Journal of Microscopy
1997 Volume.27 No. 4 p.483 ~ p.488
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A Study on Misfit Dislocation Generation in InAs Epilayers Grown on InP Substrates by Metalorganic Chemical-Vapor Deposition
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Kim Jwa-Yeon
Yun Eui-Jung
Park Kyeong-Soon
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Abstract
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A misfit dislocation generation in InAs epilayers grown on (001) InP substrates (oriented $2^{\circ}$ off (001) toward the [110] direction) using metalorganic chemical-vapor deposition was studied. The InAs film of 17 nm thickness grown at $405^{\circ}C$ showed the three different arrays of dislocations: a straight orthogonal array to the <110> direction, an array to the >100> direction, and an array tilted by a degree of $5\sim45^{\circ}$ from the [110] direction. All of the dislocations had a/2<101> Burgers vectors inclined $45^{\circ}$ to the interface. Upon annealing at $660^{\circ}C$ the InAs films with 60, 140 and 220 nm thicknesses, most of the misfit dislocations became the Lomer type $(\sim100%)$ oriented exactly along the >110> direction. These misfit dislocation spacings were decreased with increasing the InAs thickness up to 220 nm thickness. This phenomena was interpreted by the relationship between the dislocation interaction energy among parallel misfit dislocations and the opposite remnant InAs epilayer strain energy. The distance between misfit dislocations was measured by transmission electron microscopy.
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KEYWORD
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Misfit dislocation, Epilayer, Lomer dislocation, Transmission electron microscopy
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